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G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdPbc-1011 SEMI M78-1110 (first published)

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Description

SEMI M78-1110 (first published)

Two procedures for computing the results are provided

In another aspect

Details of the procedures utilized in these instruments are usually considered proprietary by the instrument manufacturers

D32で規定されたベア・ガラスIDの位置の規定は一箇所であり,大型化に伴い運用効率上複数の基板IDが必要である。そのため,D32を基本として効率的な運用を行える基板ID位置を規定するものである。

G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdPbc-1011 SEMI M78-1110 (first published)global Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : 1 ! VLSI 3. 2 Referenced SEMI Standards None.

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