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The marks must be readable by mask metrology and pattern write tools
This standard defines a unique language in the field of specification for
If wafer and stage cleanness is maintained
This correlation should include sample size as well as device geometry
SEMI MF674 — Practice for Preparing Silicon for Spreading Resistance Measurements
G07800 - SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements StdTpc-Process Chemicals - Acids The marks must be readableThis test method was technically approved by the global Automated Test Equipment Committee and is the direct responsibility of the North American Automated Test Equipment Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www. semi. org April 1999; to be published June 1999. To define the terms and provide a means of comparative, or relative measurement for the automated
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