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Such general events do not support reporting of different data sets for each process module
そのようなアレイは，パターンの描かれていない半導体ウェーハ上の，サイトフラットネス特性，欠陥マッピング，変数分布の決定，その他のサイトの位置づけをするのに有用である。
SEMI E84-0301 (technical revision)
1-0301 (technical revision)
G00500 - SEMI G5 - Standard for Ceramic Chip Carriers Revision:SEMI G5-87 - Inactive Product InformationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines the acceptance criteria for co fired, ceramic chip carriers both leaded and lead less. Referenced SEMI Standards (purchase separately) SEMI G8 Test Method for Gold Plating Quality SEMI G25 Test
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