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SEMI C44-0301 (technical revision)
sensors and actuators) and higher level devices such as controllers
SEMI E5-0200 (technical revision)
SEMI E90-1105 (technical revision)
8-1103 (technical revision)
F03200 - SEMI F32 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves Revision:SEMI F32-0706 - Superseded SEMI C44-0301 (technical revision)This test method describes how to determine two criteria used in selecting valves of appropriate size for gases and liquids. Methods and equations are specified and or referenced to assist in accurate calculation of pressure drops across valves tested by this method. This method establishes the testing criteria for determination of two coefficients specified in ANSI ISA S75. 02: Valve flow coefficient (Cv) Critical pressure drop ratio factor (xT )
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