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information about substrates is managed by the factory system
This Document covers the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample
SEMI E80-0423 (technical revision)
This Document provides guidance for specifying edge trimming and resultant particle count to ensure the successful wafer thinning process after the wafer edge trimming
Considerations relating to corrosion resistance are outside the scope of the present Standard
E06300 - SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface StdPbc-0713 information about substrates is managedThis Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers. The box opener loader unit would include one or more load ports (that would conform to SEMI E15. 1) as well as storage capacity for empty boxes or waiting lots (if needed by the tool throughput). The box opener
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